R.F. Egerton
Professor of Physics
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The Transmission Electron Microscope (TEM) provides structural information with spatial resolution down to atomic dimensions. Chemical information is obtainable by energy-dispersive x-ray (EDX) spectroscopy and electron energy-loss spectroscopy (EELS). We are seeking to further develop these techniques, particularly for the quantitative analysis of light elements in materials-science specimens.
Photoelectron Microscopy
The photoelectron microscope provides information about the topography and composition of the surface region of a specimen. The PEEM in Gertrude Rempfer's laboratory at PSU is being used to evaluate this technique as a means of examining certain types of inorganic and organic specimens.
Thin-Film and Nanostructural Materials
Thin-film techniques allow materials to be synthesized in many different forms, with a variety of structures. For example, glancing-angle deposition onto a rotating substrate results in a random array of columns or spirals. Prepatterning the substrate by electron-beam lithography can be used to produce an ordered array, with possible applications in photonics and data storage.
Radiation Effects
Radiation damage by electrons, ions or photons provides a fundamental limitation to many microanalytical techniques, and needs to be characterized and minimized if possible. On the other hand, radiation-induced changes can be exploited for nanolithography and other applications.
M. Malac, R.F. Egerton, M.J. Brett and B. Dick, Fabrication of submicrometer regular arrays of pillars and helices. J. Vac. Sci. Technol. B 17 (1999) 2671-2674.
R.F. Egerton and Manabu Takeuchi, Radiation damage to fullerite (C60) in the transmission electron microscope. Appl. Phy. Lett. 75 (1999) 1884-1886.
R.F. Egerton and I. Rauf, Dose-rate dependence of electron-induced mass loss from organic specimens. Ultramicroscopy 80 (1999) 247-254.
M. Malac and R.F. Egerton, Calibration specimens for determining energy-dispersive x-ray k-factors of boron, carbon, nitrogen, oxygen and fluorine. Microscopy and Analysis 5 (1999) 29-38.
R.F. Egerton, Spatial resolution of nanostructural analysis by electron energy-loss spectroscopy and energy-filtered imaging. J. Electron Microsc. 48 (1999) 711-716.
R.F. Egerton, Electron Energy-Loss Spectroscopy in the Electron Microscope,
second edition (Plenum Press, New York, 1996).