The combination of Schottky type field emission source and the through-lens detection technology provides the basis for ultra-high resolution.
The microscope can be operated both at low acceleration voltage (less than 1kv) and at high acceleration voltage (30kv), and is capable of surface structural characterization and chemical composition analysis.
Elemental information can be obtained by using the attached Oxford INCA EDS system. Complete computer control provides user-friendly operation.
| Instrument capabilities for function |
| Schottky type field emission source |
| Everhart-Thornley secondary electron detector |
| Oxford INCA EDS |
| specimen chamber monitoring CCD camera |
| elemental analysis by EDS |
| line scanning for elemental analysis |
| elemental mapping/spectrum mapping |
| three-dimensional imaging |
| cross section imaging |
| fully computer controlled easy operation |
| digital image recording |
| low voltage imaging down to 200V |
| high voltage of 30 kV can be obtained |