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Electron Optics: aberration correction of electron lenses

The resolution in many electron optical applications is limited by lens aberrations. These can in principle be compensated by electron mirrors. In the past years we have designed and built an aberration-corrected photoemission electron microscope. It is fully functional now and has a spatial resolution of 5nm (ref.). Its beam line is shown on the right.

Projection images of a square mesh obtained with an uncorrected electron lens system (top) and with a mirror-corrected system (bottom). No distortions are noticeable in the aberration corrected case. G. Rempfer et al., Microsc. Microanal. 3, 14 (1997)

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The resolution in many electron optical applications is limited by lens aberrations. These can in principle be compensated by electron mirrors. In the past years we have designed and built an aberration-corrected photoemission electron microscope. It is fully functional now and has a spatial resolution of 5nm (ref.). Its beam line is shown on the right.
Projection images of a square mesh obtained with an uncorrected electron lens system (top) and with a mirror-corrected system (bottom). No distortions are noticeable in the aberration corrected case.	G. Rempfer et al., Microsc. Microanal. 3, 14 (1997)