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Electron Optics: aberration correction of electron lenses

 

The resolution in many  electron optical applications is limited by lens aberrations. These can in principle be compensated by electron mirrors.  In the past years we have designed and built an aberration-corrected photoemission electron microscope. It is fully functional now and has a spatial resolution of 5nm (ref.). Its beam line is shown on the right.

 
 
  beamline
Projection  images of a square mesh obtained with an uncorrected electron lens system (top) and with a mirror-corrected system (bottom). No distortions are noticeable in the aberration corrected case.
G. Rempfer et al., Microsc. Microanal. 3, 14 (1997)

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